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At the 2026 Wanchip Exhibition and Semiconductor Industry Development Summit held today, Tuojing Technology announced the amorphous carbon film deposition technology Flowable Carbon, which has now been applied to NF-300M Supra-H equipment. Through the selection of precursors and control of process conditions, the technology series has stably realized two types of flowable carbon film processes with different filling performance, Capi-Carbon and Sedi-Carbon, respectively.

Zhitongcaijing·10/14/2026 08:17:06
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At the 2026 Wanchip Exhibition and Semiconductor Industry Development Summit held today, Tuojing Technology announced the amorphous carbon film deposition technology Flowable Carbon, which has now been applied to NF-300M Supra-H equipment. Through the selection of precursors and control of process conditions, the technology series has stably realized two types of flowable carbon film processes with different filling performance, Capi-Carbon and Sedi-Carbon, respectively.